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        Fully automatic PECVD
        Position:Home > Fully automatic PECVD >

        Fully automatic PECVD




        Functional layout


        Overall effect chart
        1、Products overview
        Low PECVD graphite boat technique on the plane is embellish technology independent research and development of photovoltaic solar cells PECVD coating production line fully automatic technique loading unloading of form a complete set of automation equipment.

        1.1The main function
        Low integration system, suitable for silicon solar cell production in the tubular PECVD graphite boat technique of automatic loading and unloading.
        Low graphite boat and boat means has: manual lift boat, graphite boat automatic handling car boat two up and down.

        1.2Basic components
        Low PECVD graphite boat loading and unloading machine PE - 3800 technique using staubli TX90L intelligent six axes linkage robot world leading technology, automatic basket basket system automatically, automatic collection stack coated silicon.

        The machine adopts European standard steel frame structure, transparent organic glass shield; At the bottom of the frame adopts steel structure welding surface anti-corrosion treatment, with robust stability is high, staubli TX90L intelligent robot installation using reinforced independent fixed frame, to ensure the stable precision. 

        2、Technical parameters
        設備名稱
        Device name
        PECVD石墨舟裝卸片機
        PECVD graphite boat loading and unloading machine technique
        型號規格
        Specifications
        PE-3800
        適用石墨舟
        Apply the graphite boat
        CT-21-240改造
        CT-21-240transform
        工位數量
        Location number
        兩個石墨舟工位分別為A石墨舟工位B石墨舟工位
        Two graphite boat station is A graphite boat station B graphite boat station respectively
        換盒傳送
        In box transfer
        伺服定位,自動換盒,更換片盒時設備不停機,
        Servo positioning, automatic switch box, replacing disc devices do not stop,
        硅片上、下料方式
        Silicon wafers, blanking mode
        上料方式:50/62/100片花籃上料;下料方式:堆疊收集
        Feeding way: 50/62/100 slice of flower basket; Blanking: stacked collection
        產能
        Capacity
        3800片/小時(備注:21片石墨舟)以此為準
        3800 pieces per hour (note: 21 pieces of graphite boat) to shall prevail
        壓縮空氣
        Compressed air
        壓力:≥0.6Mpa
        pressure:≥0.6Mpa
        運行時間
        Uptime
        >98%
        電源
        Power
        AC380V(單相三線制)/50Hz
        AC380V(Single-phase three-wire system)/50Hz
        整機功率
        Engine power
        6KW
        執行系統
        Perform system
        史陶比爾TX90L智能機器人
        Staubli TX90L intelligent robot 

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